计及边缘效应的二维差动电容式加速度传感器的输出特性
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作者单位:

1.西南交通大学希望学院;2.电子科技大学应用物理研究所

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中图分类号:

TP212

基金项目:

四川省教育厅项目(SCJG20A275)


Output characteristics of two-dimensional differential capacitive accelerometer considering edge effects
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Institute of Applied Physics,University of Electronic Science and Technology of China

Fund Project:

Sichuan Provincial Department of Education Project (SCJG20A275)

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    摘要:

    为了实现对二维加速度的精确测量,在计及边缘效应的变极距平板电容器电容及变面积圆柱面电容器电容的基础上,运用计算机数值模拟,研究计及边缘效应的双差动平板电容式加速度传感器和差动圆柱面电容角位移传感器的输出特性。数值模拟结果表明,输出特性优化后的双差动平板电容式加速度传感器和差动变面积电容角位移传感器,其灵敏度可达2.15pF/(m/s2) 和45pF/rad,且均具有良好的线性度;在计边缘效时,可减小这两种传感器的测量误差,对于文章中给定的传感器的几何尺寸和测量范围,减小的绝对误差最大值可达约1 m/s20.075rad。将双差动平板电容式加速度传感器和差动圆柱面电容角位移传感器组合,构成二维双差动电容式加速度传感器,该加速度传感器具有结构简单、测量精确度高等优点,可用于测量线运动和轴向翻滚。

    Abstract:

    In order to achieve accurate measurement of two-dimensional acceleration, based on the capacitance of variable pole distance flat capacitors and variable area cylindrical capacitors considering edge effects, computer numerical simulation is used to study the output characteristics of dual differential flat capacitive accelerometers and differential cylindrical capacitive angular displacement sensors considering edge effects. The numerical simulation results show that the optimized output characteristics of the dual differential flat capacitive accelerometer and differential variable area capacitive angular displacement sensor can achieve sensitivities of 2.15 and 45 pF/rad, respectively, and both have good linearity; When calculating edge effects, the measurement errors of these two sensors can be reduced. For the geometric dimensions and measurement range of the sensors given in the article, the maximum absolute error reduction can reach about 1 and 0.075 rad, respectively. A two-dimensional dual differential capacitive accelerometer is formed by combining a dual differential flat capacitive accelerometer and a differential cylindrical capacitive angular displacement sensor. This accelerometer has the advantages of simple structure and high measurement accuracy, and can be used to measure linear motion and axial rolling.

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  • 收稿日期:2024-10-25
  • 最后修改日期:2024-10-25
  • 录用日期:2024-11-11
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